JPH0715132Y2 - プラズマｃｖｄ装置の電極構造 - Google Patents

プラズマｃｖｄ装置の電極構造

Info

Publication number
JPH0715132Y2
JPH0715132Y2 JP1989020978U JP2097889U JPH0715132Y2 JP H0715132 Y2 JPH0715132 Y2 JP H0715132Y2 JP 1989020978 U JP1989020978 U JP 1989020978U JP 2097889 U JP2097889 U JP 2097889U JP H0715132 Y2 JPH0715132 Y2 JP H0715132Y2
Authority
JP
Japan
Prior art keywords
electrode
substrate
gas
plasma cvd
cvd apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989020978U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02113333U (en]
Inventor
義雄 鹿島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1989020978U priority Critical patent/JPH0715132Y2/ja
Publication of JPH02113333U publication Critical patent/JPH02113333U/ja
Application granted granted Critical
Publication of JPH0715132Y2 publication Critical patent/JPH0715132Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989020978U 1989-02-23 1989-02-23 プラズマｃｖｄ装置の電極構造 Expired - Lifetime JPH0715132Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989020978U JPH0715132Y2 (ja) 1989-02-23 1989-02-23 プラズマｃｖｄ装置の電極構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989020978U JPH0715132Y2 (ja) 1989-02-23 1989-02-23 プラズマｃｖｄ装置の電極構造

Publications (2)

Publication Number Publication Date
JPH02113333U JPH02113333U (en]) 1990-09-11
JPH0715132Y2 true JPH0715132Y2 (ja) 1995-04-10

Family

ID=31237807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989020978U Expired - Lifetime JPH0715132Y2 (ja) 1989-02-23 1989-02-23 プラズマｃｖｄ装置の電極構造

Country Status (1)

Country Link
JP (1) JPH0715132Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7267413B2 (ja) * 2019-05-30 2023-05-01 京セラ株式会社 流路部材

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60180114A (ja) * 1984-02-27 1985-09-13 Matsushita Electric Ind Co Ltd 非晶質膜の堆積方法および堆積装置

Also Published As

Publication number Publication date
JPH02113333U (en]) 1990-09-11

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